Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/nanoetch/211nmzep: Difference between revisions
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<gallery caption="The profiles of the 340 nm zep resist" widths="250" heights="200" perrow="3"> | <gallery caption="The profiles of the 340 nm zep resist" widths="250" heights="200" perrow="3"> |
Revision as of 12:41, 30 July 2018
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The 30 nm zep profile
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The 60 nm zep profile
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The 90 nm zep profile
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The 120 nm zep profile
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The 150 nm zep profile