Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/nanoetch/180nmzep: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon/nano/nanoetch/180nmzep click here]'''  
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Revision as of 12:41, 30 July 2018

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  • The profiles of the 180 nm zep resist
  • The 30 nm zep profile
    The 30 nm zep profile
  • The 60 nm zep profile
    The 60 nm zep profile
  • The 90 nm zep profile
    The 90 nm zep profile
  • The 120 nm zep profile
    The 120 nm zep profile
  • The 150 nm zep profile
    The 150 nm zep profile
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