Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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|'''**''' Thickness above 200 nm: ask for permission. | |'''**''' Thickness above 200 nm: ask for permission. | ||
|'''*''' Thickness above 600 nm: ask for permission. | |'''*''' Thickness above 600 nm: ask for permission. | ||
| Line 227: | Line 226: | ||
| Pumpdown approx. 1 hour. | | Pumpdown approx. 1 hour. | ||
|'''**'''Thickness above 200 nm: ask for permission | |'''**'''Thickness above 200 nm: ask for permission | ||
Pumpdown approx. 1 hour. | |||
|'''**'''Thickness above 200 nm: ask for permission. | |'''**'''Thickness above 200 nm: ask for permission. | ||
Pumpdown approx. 10 min. | Pumpdown approx. 10 min. | ||