Specific Process Knowledge/Characterization/XRD: Difference between revisions
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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | ||
|style="background:WhiteSmoke; color:black"|<b> | |style="background:WhiteSmoke; color:black"|<b>XRD SmartLab</b> | ||
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!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60"|Purpose | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| Crystal structure analysis and thin film thickness measurement | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *Phase ID | ||
* | *Crystal Size | ||
*Crystallinity | |||
*Quality and degree of orientation | |||
*3D orientation | |||
*Latice strain | |||
*Composition | |||
*Twist | |||
*3D lattice constant | |||
*Thickness | |||
*Roughness | |||
*Density | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | ||