Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
Added links to cross-contamination sheet for allowed substrates and materials |
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*Quartz wafers | *Quartz wafers | ||
*Pyrex wafers | *Pyrex wafers | ||
*See also the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=429 cross-contamination sheet] | |||
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| style="background:LightGrey; color:black"|Material allowed on the substrate | | style="background:LightGrey; color:black"|Material allowed on the substrate | ||
| Line 100: | Line 101: | ||
*Mylar | *Mylar | ||
*Metals | *Metals | ||
|- | *See also the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=429 cross-contamination sheet]|- | ||
|} | |} | ||