Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3: Difference between revisions
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'''Feedback to this page: | |||
[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus click here]''' | |||
[[Category: Equipment |Etch DRIE]] | |||
[[Category: Etch (Dry) Equipment|DRIE]] | |||
'''The tool is currently being installed - we hope that it will be available by early 2019. | '''The tool is currently being installed - we hope that it will be available by early 2019. | ||
''' | ''' | ||
Revision as of 14:24, 3 July 2018
Feedback to this page: click here
The tool is currently being installed - we hope that it will be available by early 2019.