Specific Process Knowledge/Etch/DryEtchProcessing/Comparison: Difference between revisions
| Line 172: | Line 172: | ||
* Parameter ramping | * Parameter ramping | ||
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| style="background:WhiteSmoke; color:black" | | |||
* Bosch multiplexing | |||
* Parameter ramping | |||
* SOI option | |||
* Calritas endpoint detection | |||
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* Bosch multiplexing | * Bosch multiplexing | ||
| Line 202: | Line 207: | ||
* Sapphire | * Sapphire | ||
* SiC | * SiC | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" colspan="2"| | ||
* Silicon | * Silicon | ||
* Fused silica | * Fused silica | ||