Specific Process Knowledge/Etch/DryEtchProcessing/Comparison: Difference between revisions
| Line 67: | Line 67: | ||
|-valign="top" | |-valign="top" | ||
! style="background:lightgrey; color:black" | Gasses | ! style="background:lightgrey; color:black" | Gasses | ||
| style="background:lightgrey; color:black | | style="background:lightgrey; color:black" | | ||
{| | {| | ||
| SF<sub>6</sub> | | SF<sub>6</sub> | ||
| Line 89: | Line 89: | ||
| He | | He | ||
|} | |} | ||
|style="background:lightgrey; color:black" | | |style="background:lightgrey; color:black" colspan="2" | | ||
{| | {| | ||
| SF<sub>6</sub> | | SF<sub>6</sub> | ||
| Line 143: | Line 143: | ||
* Coil generator | * Coil generator | ||
* Platen generator | * Platen generator | ||
| style="background:WhiteSmoke; color:black" | | | style="background:WhiteSmoke; color:black" colspan="2"| | ||
* Coil generator | * Coil generator | ||
* Platen generator | * Platen generator | ||
| Line 161: | Line 161: | ||
| style="background:lightgrey; color:black" | Loading via dedicated two-slot carousel load lock | | style="background:lightgrey; color:black" | Loading via dedicated two-slot carousel load lock | ||
| style="background:lightgrey; color:black" | Loading via dedicated two-slot carousel load lock or via atmospheric cassette loader | | style="background:lightgrey; color:black" | Loading via dedicated two-slot carousel load lock or via atmospheric cassette loader | ||
| style="background:lightgrey; color:black" | Loading via dedicated two-slot carousel load lock | |||
| style="background:lightgrey; color:black" | Loading via dedicated two-slot carousel load lock | | style="background:lightgrey; color:black" | Loading via dedicated two-slot carousel load lock | ||
| style="background:lightgrey; color:black" | Manual loading directly into process chamber | | style="background:lightgrey; color:black" | Manual loading directly into process chamber | ||