Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions
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{| border="2" cellspacing="0" cellpadding="4" align="center" | {| border="2" cellspacing="0" cellpadding="4" align="center" | ||
! | ! | ||
! Wet Silicon Oxide etch (BHF, SIO Etch (wetting agent),5%HF) | ! Wet Silicon Oxide etch (BHF, SIO Etch (wetting agent), 5%HF) | ||
! RIE | ! RIE | ||
! AOE | ! AOE | ||