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Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions

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{| border="2" cellspacing="0" cellpadding="4" align="center"
{| border="2" cellspacing="0" cellpadding="4" align="center"
!  
!  
! Wet Silicon Oxide etch (BHF and SIO Etch (wetting agent))
! Wet Silicon Oxide etch (BHF, SIO Etch (wetting agent),5%HF)
! RIE
! RIE
! AOE
! AOE
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