Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1: Difference between revisions
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'''Characterisation of etched trenches''' | '''Characterisation of etched trenches''' | ||
Comparing differences in etched trenches requires a set of common parameters for each trench. Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation| | Comparing differences in etched trenches requires a set of common parameters for each trench. Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation|'''HERE''']] to find more information about the parameters used on the DRIE-Pegasus process development. | ||