Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
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\alpha}{\sqrt{\mathrm{ED}^2+\alpha^2}}) </math> with <math> \alpha = \tfrac{\mathrm{TW}-\mathrm{BW}}{2} </math> | \alpha}{\sqrt{\mathrm{ED}^2+\alpha^2}}) </math> with <math> \alpha = \tfrac{\mathrm{TW}-\mathrm{BW}}{2} </math> | ||
=== | === What the numbers fail to represent or ignore === | ||
The numbers and measurements above | The numbers and measurements above provide a reasonable good basis for comparing DRIE trenches. They do, however, not take the following aspects into account: | ||
* 1 | |||