Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
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; Etch rate (expressed either as nm/min or µm/min or as nm/cyc or µm/cyc) | ; Etch rate (expressed either as nm/min or µm/min or as nm/cyc or µm/cyc) | ||
: Divide the etched depth (ED) by the etch time (ET) or the number of Bosch cycles of the process: | : Divide the etched depth (ED) by the etch time (ET) or the number of Bosch cycles (NC) of the process: | ||
: <math> \tfrac{\mathrm{ED} \times \mathrm{PS}}{\mathrm{ET}}</math> | : <math> \tfrac{\mathrm{ED} \times \mathrm{PS}}{\mathrm{ET}}</math> | ||