Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
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: <math> \tfrac{(\mathrm{MT-MR}) \times \mathrm{PS}}{\mathrm{ET}} </math> | : <math> \tfrac{(\mathrm{MT-MR}) \times \mathrm{PS}}{\mathrm{ET}} </math> | ||
; Selectivity | |||
: <math> \tfrac{\mathrm{ED}{\mathrm{MT-MR} </math> | |||
; CD loss (nm per edge) | ; CD loss (nm per edge) | ||