Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
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=== Output parameters === | === Output parameters === | ||
Assuming that all measurements in the image are done in pixels (as described above) rather than in microns/nanometers: | |||
; Etched depth (nm or µm) | ; Etched depth (nm or µm) | ||