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Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Line 19: Line 19:
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|-
! Sidewall angle  
! Sidewall angle  
| <math>acos(\frac{TW-{{tiny|BW}}}{2\sqrt{D^2+\frac{1}{4}(TW^2-BW^2)}})  </math>
| <math>acos(\frac{TW-BW}{2\sqrt{D^2+\frac{1}{4}(TW^2-BW^2)}})  </math>
|-
|-
|}
|}
{{tiny|tiny}} tiny
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