Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions
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*:[http://labmanager.danchip.dtu.dk/d4Show.php?id=1897&mach=64 see APV here] | *:[http://labmanager.danchip.dtu.dk/d4Show.php?id=1897&mach=64 see APV here] | ||
*:[ | *:[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZMSkhFR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K see SDS here] | ||
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*:[http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 see | *:[http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 see SDS here] | ||
*:[ | *:[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZMSkhOSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K see SDS here] | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*:[http://labmanager.danchip.dtu.dk/d4Show.php?id=1897&mach=64 see APV here] | *:[http://labmanager.danchip.dtu.dk/d4Show.php?id=1897&mach=64 see APV here] | ||
*:[http://kemibrug.dk/KBA/CAS/106534/?show_KBA=1&portaldesign=1 see | *:[http://kemibrug.dk/KBA/CAS/106534/?show_KBA=1&portaldesign=1 see SDS here] | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Performance | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Performance | ||