Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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* Parameter ramping during process steps | * Parameter ramping during process steps | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan=" | !style="background:silver; color:black" align="center" valign="center" rowspan="4"|Substrates | ||
|style="background:whitesmoke; color:black"|Sizes | |style="background:whitesmoke; color:black"|Sizes | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*<nowiki>#</nowiki> small samples on carriers | *<nowiki>#</nowiki> small samples on carriers | ||