Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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{| border="2" cellspacing="0" cellpadding="0" align="center" | {| border="2" cellspacing="0" cellpadding="0" align="center" | ||
! colspan="2" style="background:silver; color:black" | | ! colspan="2" style="background:silver; color:black" | | ||
! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/ | ! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1| DRIE-Pegasus 1]] | ||
! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2| DRIE-Pegasus 2]] | |||
! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus| DRIE-Pegasus | ! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3| DRIE-Pegasus 3]] | ||
! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/ | ! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4| DRIE-Pegasus 4]] | ||
! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/ | |||
|- valign="top" | |- valign="top" | ||
! rowspan="2" style="background:silver; color:black" width="120" |Purpose | ! rowspan="2" style="background:silver; color:black" width="120" |Purpose | ||