Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
| Line 18: | Line 18: | ||
| DRIE-Pegasus 2 | | DRIE-Pegasus 2 | ||
|- | |- | ||
| Serial MP0636 | | align="center" | Serial MP0636 | ||
| Serial MP0641 | | Serial MP0641 | ||
|} | |} | ||
| Line 18: | Line 18: | ||
| DRIE-Pegasus 2 | | DRIE-Pegasus 2 | ||
|- | |- | ||
| Serial MP0636 | | align="center" | Serial MP0636 | ||
| Serial MP0641 | | Serial MP0641 | ||
|} | |} | ||