Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions
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It measures with an accurracy within a few µm. | It measures with an accurracy within a few µm. | ||
The range is from a few µm up to 5mm | The range is from a few µm up to 5mm. | ||
Measure the wafer in the box next to the meter.If this is ok, then other wafers can be measured. | Measure the wafer in the box next to the meter.If this is ok, then other wafers can be measured. | ||
There is a calibration device by the DEKTAK. | There is a calibration device by the DEKTAK. | ||
It is calibrated at 750µm | It is calibrated at 750µm. | ||
Revision as of 07:23, 29 August 2008
This is a micrometer-screw.
It measures with an accurracy within a few µm. The range is from a few µm up to 5mm. Measure the wafer in the box next to the meter.If this is ok, then other wafers can be measured. There is a calibration device by the DEKTAK. It is calibrated at 750µm.