Specific Process Knowledge/Etch/KOH Etch/ProcessInfo: Difference between revisions
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|Etch rate in Si(100) | |Etch rate in Si(100) | ||
| | |Latest QC Data on [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=376 Si Etch 1 Info] page (under Documents) | ||
| | |Latest QC Data on [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=390 Si Etch 2 Info] page (under Documents) | ||
| | |Latest QC Data on [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=407 Si Etch 3 Info] page (under Documents) | ||
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|Roughness | |Roughness | ||