Jump to content

Specific Process Knowledge/Etch/KOH Etch/ProcessInfo: Difference between revisions

Choi (talk | contribs)
Choi (talk | contribs)
Line 41: Line 41:
|-
|-
|Etch rate in Si(100)
|Etch rate in Si(100)
|See latest Si Etch 1 QC test results
|See latest QC Data on Si Etch 1 Document page
|See latest Si Etch 2 QC test results
|See latest QC Data on Si Etch 2 Document page
|See latest Si Etch 3 QC test results
|See latest QC Data on Si Etch 3 Document page
|-
|-
|Roughness
|Roughness