Specific Process Knowledge/Thin film deposition/Deposition of TiW: Difference between revisions

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	Deposition of TiW alloy can take place in the Wordentec.		Deposition of TiW alloy can take place in the Wordentec.

			This is done by a sputtering process, process parameters (argon pressure and effect) can be varied, and the deposition rate and surface roughness may change with these settings.