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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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==Resolution[[Image:section under construction.jpg|70px]]==
==Resolution[[Image:section under construction.jpg|70px]]==
The pixel-size of the DMM is 0.5µmX0.5µm (at the sample surface), so this is the ultimate resolution of the Aligner: Maskless 01, and also the smallest step that will produce features of different size. The lithographic resolution of the machine is 1µm on paper, which was demonstrated in the acceptance test after installation using a resist thickness of 0.5µm. In 1.5µm thick resist, the resolution is around 2µm.
The pixel-size of the DMD in the ligner: Maskless 01 is 0.5µmX0.5µm (at the sample surface). The lithographic resolution of the machine is 1µm on paper, which was demonstrated in the acceptance test after installation using a resist thickness of 0.5µm. This result has later been confirmed. In 1.5µm thick resist, the resolution is around 2µm.


The table below shows  
The table below shows the result of a resolution test using 1.5µm and 0.5µm positive resist.
... The effect of corner correction is significant below 2µm, but negligible above 4µm.  
... The effect of corner correction is significant below 2µm, but negligible above 4µm.  


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