Specific Process Knowledge/Etch/DRIE-Pegasus/System-description: Difference between revisions
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The RF generators in a dry etch tool fac | The RF generators in a dry etch tool fac | ||
[[File:RF matching 1.jpg| | [[File:RF matching 1.jpg|500px]] | ||
RF generators in AC circuit with a load: | RF generators in AC circuit with a load: | ||
One cannot just connect an RF generator to a coil, put a certain power through and expect a plasma generated absorb all energy. It is not possible: At RF frequencies even cables become inductors so circuits must be carefully constructed. Here, the coil of an ICP is shown but the RIE setup is equivalent. | One cannot just connect an RF generator to a coil, put a certain power through and expect a plasma generated absorb all energy. It is not possible: At RF frequencies even cables become inductors so circuits must be carefully constructed. Here, the coil of an ICP is shown but the RIE setup is equivalent. | ||