Jump to content

Specific Process Knowledge/Etch/DRIE-Pegasus/System-description: Difference between revisions

Jmli (talk | contribs)
Jmli (talk | contribs)
No edit summary
Line 1: Line 1:
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/processC click here]'''
<!--Checked for updates on 14/5-2018 - ok/jmli -->
== The Bosch process at the DRIE-Pegasus ==
== The Bosch process at the DRIE-Pegasus ==
<!-- revised 1/6-2015 by jmli -->
<!-- revised 1/6-2015 by jmli -->