Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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Aligner: Maskless 01 is not a direct writer. In the maskless aligner, the exposure light is passed through a spatial light modulator, much like in a projektor, and projected onto the substrate, thus exposing an area of the design at a time. The wafer is exposed by stepping the exposure field across the wafer. | Aligner: Maskless 01 is not a direct writer. In the maskless aligner, the exposure light is passed through a spatial light modulator, much like in a projektor, and projected onto the substrate, thus exposing an area of the design at a time. The wafer is exposed by stepping the exposure field across the wafer. | ||