Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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The pixel-size of the DMM is 0.5µmX0.5µm (at the sample surface), so this is the ultimate resolution of the Aligner: Maskless 01, and also the smallest step that will produce features of different size. The lithographic resolution of the machine is 1µm on paper, which was demonstrated in the acceptance test after installation. The resist thickness needed for this resolution is 0.5µm. In 1.5µm thick resist, the resolution is around 2-3µm. | The pixel-size of the DMM is 0.5µmX0.5µm (at the sample surface), so this is the ultimate resolution of the Aligner: Maskless 01, and also the smallest step that will produce features of different size. The lithographic resolution of the machine is 1µm on paper, which was demonstrated in the acceptance test after installation. The resist thickness needed for this resolution is 0.5µm. In 1.5µm thick resist, the resolution is around 2-3µm. | ||