Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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=Optimal use of the maskless aligner | =Optimal use of the maskless aligner= | ||
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The site acceptance test performed during the installation of the Aligner: Maskless 01 showed an exposure time/speed of 0.025 min/mm<sup>2</sup>, which is slightly lower than the 0.02 min/mm<sup>2</sup> given in the specifications. At such speeds, a full 4" design would take 2:30-3:15 hours to expose. In practice, we observe exposure times in excess of 2 hours for a full 4" design. | The site acceptance test performed during the installation of the Aligner: Maskless 01 showed an exposure time/speed of 0.025 min/mm<sup>2</sup>, which is slightly lower than the 0.02 min/mm<sup>2</sup> given in the specifications. At such speeds, a full 4" design would take 2:30-3:15 hours to expose. In practice, we observe exposure times in excess of 2 hours for a full 4" design. | ||