Specific Process Knowledge/Etch/III-V ICP: Difference between revisions
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== The III-V ICP == | == The III-V ICP == | ||
Name: PRO ICP <br> | |||
Vendor: STS (now SPTS) <br> | |||
The III-V ICP is a state-of-the-art etch tool. The combination of advanced hardware and software enables you to either use the optimized standard processes or to tailor etch processes for your specific needs. The tool can be used for etching of different materials, but is primarily intented for etching of III-V materials. | The III-V ICP is a state-of-the-art etch tool. The combination of advanced hardware and software enables you to either use the optimized standard processes or to tailor etch processes for your specific needs. The tool can be used for etching of different materials, but is primarily intented for etching of III-V materials. | ||