Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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===Dry etches:=== | ===Dry etches:=== | ||
*[[/Si etch using ASE|Si etch using ASE (Advanced Silicon Etch)]] | *[[/Si etch using ASE|Si etch using ASE (Advanced Silicon Etch)]] | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus|Si etch using DRIE-Pegasus (Silicon Etch)]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus|Si etch using DRIE-Pegasus (Silicon Etch)]] | ||