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Specific Process Knowledge/Etch/Etching of Bulk Glass: Difference between revisions

Bghe (talk | contribs)
Bghe (talk | contribs)
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*What can be fitted in a plastic beaker
*What can be fitted in a plastic beaker
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*As many small samples as can be fitted on the 100mm carrier.
*As many small samples as can be fitted on the 100mm carrier (bad/no cooling!)
*<nowiki>#</nowiki>1 100mm wafer (or smaller with carrier)
*<nowiki>#</nowiki>1 100mm wafer (or smaller with carrier)
*<nowiki>#</nowiki>1 150mm wafer (only RIE2 when set up for 150mm)  
*<nowiki>#</nowiki>1 150mm wafer (only when set up for 150mm)  
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*As many small samples as can be fitted on a 100mm wafer
*As many small samples as can be fitted on a 100mm wafer