Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions
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*No limits cross contamination wise | *No limits cross contamination wise | ||
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*[http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID= | *[http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=105 Please take a look in the cross contamination sheet in LabManager for details] | ||
*Silicon | *Silicon | ||
*Silicon Oxide | *Silicon Oxide | ||