Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions
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*DUV resist | *DUV resist | ||
*E-beam resist | *E-beam resist | ||
*Other metals if they cover less than 5% of the wafer area | *Other metals if they cover less than 5% of the wafer area | ||
*Quartz/fused silica | *Quartz/fused silica | ||
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