Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||
|style="background:LightGrey; color:black"|Substrate size | |style="background:LightGrey; color:black" |Substrate size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black" align="center"| | ||
*Chips 5x5 mm and up | *Chips 5x5 mm and up | ||
*50 mm wafers | *50 mm wafers | ||
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|style="background:WhiteSmoke; color:black" align="center"| | |style="background:WhiteSmoke; color:black" align="center"| | ||
All cleanroom materials | All cleanroom materials | ||
'''Please ONLY use substances which is for the dedicated bowlsets in labspins''' | |||
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