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Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
No edit summary
Line 28: Line 28:
| 3      <!-- platen power -->
| 3      <!-- platen power -->
|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1|1]]    <!-- link processes -->
|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1|1]]    <!-- link processes -->
| NA     <!-- keywords -->
| Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen     <!-- keywords -->
|-
|-
! Isoslow7      <!-- recipe name -->
! Isoslow7      <!-- recipe name -->
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