Specific Process Knowledge/Thin film deposition/Deposition of Chromium: Difference between revisions
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== Studies of Cr deposition processes == | == Studies of Cr deposition processes == | ||
[[Uniformity of Cr layers]] - ''Uniformity of Cr layers deposited with different settings'' | [[/Deposition of Chromium|Uniformity of Cr layers]] - ''Uniformity of Cr layers deposited with different settings'' | ||
[[/Deposition of Chromium|Sputtering of Cr in Wordentec]] - ''Sputtering of Cr in Wordentec (settings and rates)'' | [[/Deposition of Chromium|Sputtering of Cr in Wordentec]] - ''Sputtering of Cr in Wordentec (settings and rates)'' | ||