Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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==Writing speed== | ==Writing speed== | ||
The site acceptance test performed during the installation of the Aligner: Maskless 01 showed an exposure time/speed of 0.025 min/mm2, which is slightly lower than the 0.02 min/mm2 given in the specifications. At such speeds, a full 4" design would take 2.6-3.3 hours to expose. In practice, we observe exposure times on the order of 2 hours for a full 4" design. | |||
==Design philosophy== | ==Design philosophy== | ||
==Mix-and-match== | ==Mix-and-match== | ||