Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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=== | ===Overview of the performance of Tencor P1 stylus profiler=== | ||
{| border="2" cellspacing="0" cellpadding="10" | {| border="2" cellspacing="0" cellpadding="10" | ||
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Line scan x: Full substrate size | Line scan x: Full substrate size | ||
|- | |- | ||
|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"|Scan range z | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
<100 Å to ~0.3 mm | <100 Å to ~0.3 mm | ||
|- | |- | ||
|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"|Resolution xy | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
up to 5900 data points per profile | up to 5900 data points per profile | ||
|- | |- | ||
|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"|Resolution z | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
1Å or 25Å | 1Å or 25Å | ||
|- | |- | ||
|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
0.87(W[µm]-5µm) | 0.87(W[µm]-5µm) | ||
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*up to 4" | *up to 4" | ||
|- | |- | ||
|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
| style="background:LightGrey; color:black"|Substrate material allowed | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*In principle all materials | *In principle all materials | ||
|- | |- | ||
|} | |} | ||
==Comparing the profilers== | ==Comparing the profilers== | ||
Take a look at the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page. | Take a look at the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page. | ||