Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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Line scan x: 50 µm to 200 mm | Line scan x: 50 µm to 200 mm | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"|Scan range z | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
50 Å to 262 µm | 50 Å to 262 µm | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"|Resolution xy | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
down to 0.067 µm | down to 0.067 µm | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"|Resolution z | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
1Å, 10Å or 20Å | 1Å, 10Å or 20Å | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
1.2(W[µm]-5µm) | 1.2(W[µm]-5µm) | ||
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*up to 8" | *up to 8" | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
| style="background:LightGrey; color:black"|Substrate material allowed | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*In principle all materials | *In principle all materials | ||
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==Tencor stylus profiler== | ==Tencor stylus profiler== | ||