Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions

Revision as of 14:45, 30 January 2018 view source Lgpe (talk \| contribs) DCH-Employees-701, NLAB-Employees-701 353 edits →Location ← Older edit		Revision as of 14:47, 30 January 2018 view source Lgpe (talk \| contribs) DCH-Employees-701, NLAB-Employees-701 353 edits →Manuals Newer edit →
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	==Manuals==		==Manuals==

	There are 3 manuals for the e-beam writer; apart from the main manual (this manual) there is a sdf and jdf-file manual, and a ~~BEAMER~~ manual. They can ~~both~~ be accessed from LabManager under Technical documents.		There are 4 manuals for the e-beam writer; apart from the main manual (this manual) there is a sdf and jdf-file manual, a BEAMER manual and a 2D mark detection manual. They can all be accessed from LabManager under Technical documents.