Specific Process Knowledge/Characterization/Hardness measurement: Difference between revisions

Revision as of 12:48, 25 January 2018 view source Choi (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, danchip 641 edits →Equipment performance and process related parameters ← Older edit		Revision as of 12:53, 25 January 2018 view source Choi (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, danchip 641 edits →Hardness tester Newer edit →
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	[[Image:InnovaHardness.jpg\|thumb\|300x300px\|Hardness tester. Positioned in cleanroom F-2]]		[[Image:InnovaHardness.jpg\|thumb\|300x300px\|Hardness tester. Positioned in cleanroom F-2]]

	The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation).		The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the roughness reliably.