Specific Process Knowledge/Wafer and sample drying/Spin Dryers: Difference between revisions
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|style="background:WhiteSmoke; color:black"|<b>Spin dryer 2</b> | |style="background:WhiteSmoke; color:black"|<b>Spin dryer 2</b> | ||
|style="background:WhiteSmoke; color:black"|<b>Spin dryer 3</b> | |style="background:WhiteSmoke; color:black"|<b>Spin dryer 3</b> | ||
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!style="background:silver; color:black;" align="center" width="60"|Location | !style="background:silver; color:black;" align="center" width="60"|Location | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*D-3 | *D-3 | ||
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!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60"|Purpose | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Drying | *Drying | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||
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*1-25 100 mm wafers | *1-25 100 mm wafers | ||
*1-25 150 mm wafers | *1-25 150 mm wafers | ||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Only for RCA cleaned wafers | *Only for RCA cleaned wafers | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*No restrictions | *No restrictions | ||
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