Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions
| Line 65: | Line 65: | ||
|style="background:LightGrey; color:black"|Batch size | |style="background:LightGrey; color:black"|Batch size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*1 4" wafer per run | *1 4" wafer per run | ||
*1 2" wafer per run (requires carrier) | *1 2" wafer per run (requires carrier) | ||