Specific Process Knowledge/Etch/Wet Gold Etch: Difference between revisions
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! | ! | ||
! Iodine based gold etch | ! Iodine based gold etch | ||
! Aqua Regia ( | ! Aqua Regia (kongevand) | ||
! Dilute Aqua Regia (fortyndet kongevand) | |||
|- | |- | ||
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!General description | !General description | ||
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Etch of | Etch of gold with or without photoresist mask. | ||
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Etch of | Etch of gold (as stripper). | ||
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Etch of gold. | |||
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!Link to safety APV | !Link to safety APV | ||
|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 See APV here]. | |[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 See APV here]. | ||
|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 See APV here] | |||
|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 See APV here] | |[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 See APV here] | ||
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|KI:I<sub>2</sub>:H<sub>2</sub>O (100g:25g:500ml) | |KI:I<sub>2</sub>:H<sub>2</sub>O (100g:25g:500ml) | ||
|HCl:HNO<sub>3</sub> (3:1) | |HCl:HNO<sub>3</sub> (3:1) | ||
|HCl:HNO<sub>3</sub>:H<sub>2</sub>O (3:1:2) | |||
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!Process temperature | !Process temperature | ||
| | |20°C | ||
| | |20°C | ||
|20-30°C | |||
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Unmasked - used as a stripper | Unmasked - used as a stripper | ||
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Difficult to mask. Mainly used as a stripper. | |||
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~(??) nm/min - fast etch | ~(??) nm/min - fast etch | ||
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~680 nm/min at 30°C | |||
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!Batch size | !Batch size | ||
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1-5 | 1-5 4" wafers at a time | ||
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1-5 4" | 1-5 4" wafers at a time | ||
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1-5 4" wafers at a time | |||
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!Size of substrate | !Size of substrate | ||
|Any size and number that can go inside the beaker in use | |||
|Any size and number that can go inside the beaker in use | |Any size and number that can go inside the beaker in use | ||
|Any size and number that can go inside the beaker in use | |Any size and number that can go inside the beaker in use | ||
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No restrictions when used in beaker. | No restrictions when used in beaker. | ||
Make a note on the beaker of which materials have been processed. | |||
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No restrictions when used in beaker. | |||
Make a note on the beaker of which materials have been processed. | Make a note on the beaker of which materials have been processed. | ||
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|} | |} | ||