Specific Process Knowledge/Characterization/Hardness measurement: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Hardness_measurement click here]''' | '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Hardness_measurement click here]''' | ||
==Hardness | ==Hardness tester== | ||
[[Image:InnovaHardness.jpg|thumb|300x300px|Hardness | [[Image:InnovaHardness.jpg|thumb|300x300px|Hardness tester. Positioned in cleanroom F-2]] | ||
The purpose is to measure hardness of samples or films. | The purpose is to measure hardness of samples or films. | ||
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'''The user manual, technical information and contact information can be found in LabManager:''' | '''The user manual, technical information and contact information can be found in LabManager:''' | ||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=xxx Hardness | '''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=xxx Hardness tester]''' | ||
==Quality Control - Recipe Parameters and Limits== | ==Quality Control - Recipe Parameters and Limits== | ||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | {| border="1" cellspacing="2" cellpadding="2" colspan="3" | ||
|bgcolor="#98FB98" |'''Quality Control (QC) for the hardness | |bgcolor="#98FB98" |'''Quality Control (QC) for the hardness tester''' | ||
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Purpose | Purpose | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
Hardness | Hardness tester | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Sample hardness | *Sample hardness | ||
Revision as of 14:10, 19 January 2018
THIS PAGE IS UNDER CONSTRUCTION
Feedback to this page: click here
Hardness tester
The purpose is to measure hardness of samples or films.
The user manual, technical information and contact information can be found in LabManager:
Quality Control - Recipe Parameters and Limits
| Quality Control (QC) for the hardness tester |
|
The measured standard hardnesses are 2xx HV, 4xx HV and 6xx HV. The QC is performed x times a year. |
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Purpose |
Hardness tester |
|
|---|---|---|
|
Performance |
Indent force |
|
|
Substrates |
Batch size |
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| Substrate materials allowed |
|