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Specific Process Knowledge/Characterization/Hardness measurement: Difference between revisions

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=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Hardness_measurement click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Hardness_measurement click here]'''  


==Hardness measurer==
==Hardness tester==
[[Image:InnovaHardness.jpg|thumb|300x300px|Hardness Measurer. Positioned in cleanroom F-2]]
[[Image:InnovaHardness.jpg|thumb|300x300px|Hardness tester. Positioned in cleanroom F-2]]


The purpose is to measure hardness of samples or films.  
The purpose is to measure hardness of samples or films.  
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'''The user manual, technical information and contact information can be found in LabManager:'''
'''The user manual, technical information and contact information can be found in LabManager:'''


'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=xxx Hardness measurer]'''
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=xxx Hardness tester]'''


==Quality Control - Recipe Parameters and Limits==
==Quality Control - Recipe Parameters and Limits==
{| border="1" cellspacing="2" cellpadding="2" colspan="3"
{| border="1" cellspacing="2" cellpadding="2" colspan="3"
|bgcolor="#98FB98" |'''Quality Control (QC) for the hardness measurer'''
|bgcolor="#98FB98" |'''Quality Control (QC) for the hardness tester'''
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Purpose  
Purpose  
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|style="background:LightGrey; color:black"|
Hardness measurer
Hardness tester
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|style="background:WhiteSmoke; color:black"|
*Sample hardness
*Sample hardness