Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions

Revision as of 13:24, 19 January 2018

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The purpose is to measure hardness of samples or films.

The user manual, technical information and contact information can be found in LabManager:

Quality Control (QC) for the Thickness measurer

The measured standard thickness is 0.1 mm. The QC is performed x times a year.

Purpose	Thickness measurer	Wafer thickness Depths of larger grooves Heigth of larger mesas
Performance	Thickness resolution	< 5 µm
Substrates	Batch size	One sample
Substrates	Substrate materials allowed	No restrictions

@@ Line 2: / Line 2: @@
 ==Thickness measurer==
-[[Image:Thicknessmeasurer2007.jpg|thumb|300x300px|Thickness Measurer. Positioned in cleanroom D-3]]
+[[Image:Thicknessmeasurer2007.jpg|thumb|300x300px|Hardness Measurer. Positioned in cleanroom F-2]]
-The purpose is to measure the thickness of wafers, depths of larger grooves or height of larger mesas.
+The purpose is to measure hardness of samples or films.
-During a KOH etch it can be helpful to ensure no over-etching by making a thickness measurement during the etching.
 '''The user manual, technical information and contact information can be found in LabManager:'''
-'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=198 Thickness measurer]'''
+'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=xxx Hardness measurer]'''
 ==Quality Control - Recipe Parameters and Limits==
@@ Line 18: / Line 16: @@
 |-
 |
-The measured standard thickness is 0.1 mm. The measured result has to be within &plusmn; 0.005 mm. The QC is preformed once a year.
+The measured standard thickness is 0.1 mm. The QC is performed x times a year.
-*[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1831&mach=198 The QC procedure]<br>
+*[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1831&mach=xxx The QC procedure]<br>
-*[http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=2062 The newest QC data]<br>
 |}