Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions
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==Thickness measurer== | ==Thickness measurer== | ||
[[Image:Thicknessmeasurer2007.jpg|thumb|300x300px| | [[Image:Thicknessmeasurer2007.jpg|thumb|300x300px|Hardness Measurer. Positioned in cleanroom F-2]] | ||
The purpose is to measure | The purpose is to measure hardness of samples or films. | ||
'''The user manual, technical information and contact information can be found in LabManager:''' | '''The user manual, technical information and contact information can be found in LabManager:''' | ||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach= | '''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=xxx Hardness measurer]''' | ||
==Quality Control - Recipe Parameters and Limits== | ==Quality Control - Recipe Parameters and Limits== | ||
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The measured standard thickness is 0.1 | The measured standard thickness is 0.1 mm. The QC is performed x times a year. | ||
*[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1831&mach= | *[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1831&mach=xxx The QC procedure]<br> | ||
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