Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
| Line 116: | Line 116: | ||
| -0.25±0.35 | | -0.25±0.35 | ||
| -0.29±0.16 | | -0.29±0.16 | ||
| 6.39±1.67 | | -6.39±1.67 | ||
| -1.39±1.18 | | -1.39±1.18 | ||
| Line 116: | Line 116: | ||
| -0.25±0.35 | | -0.25±0.35 | ||
| -0.29±0.16 | | -0.29±0.16 | ||
| 6.39±1.67 | | -6.39±1.67 | ||
| -1.39±1.18 | | -1.39±1.18 | ||