Jump to content

Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
Line 89: Line 89:
(two samples)
(two samples)
|'''X'''
|'''X'''
| -0.03±0.05
| -0.03±0.08
| 0.01±0.05
| 0.00±0.05
| 1.00±2.33
| -0.97±1.67
| 0.00±1.18
| 0.42±1.18


|-
|-
Line 99: Line 99:
| -0.05±0.05
| -0.05±0.05
| -0.07±0.05
| -0.07±0.05
| 0.42±2.33
| -0.42±1.67
| 0.00±1.18
| 0.00±1.18


Line 106: Line 106:
|rowspan="2" align="center"|With flat alignment
|rowspan="2" align="center"|With flat alignment
|'''X'''
|'''X'''
| 0.00±0.05
| 0.05±0.10
| 0.05±0.05
| 0.05±0.05
| -0.67±2.33
| 0.56±1.67
| -1.67±1.18
| -1.67±1.18


Line 114: Line 114:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Y'''
|'''Y'''
| -0.25±0.05
| -0.25±0.35
| -0.29±0.05
| -0.29±0.16
| 6.33±2.33
| 6.39±1.67
| -1.38±1.18
| -1.39±1.18


|}
|}