Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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| Line 89: | Line 89: | ||
(two samples) | (two samples) | ||
|'''X''' | |'''X''' | ||
| -0.03±0. | | -0.03±0.08 | ||
| 0. | | 0.00±0.05 | ||
| | | -0.97±1.67 | ||
| 0. | | 0.42±1.18 | ||
|- | |- | ||
| Line 99: | Line 99: | ||
| -0.05±0.05 | | -0.05±0.05 | ||
| -0.07±0.05 | | -0.07±0.05 | ||
| 0. | | -0.42±1.67 | ||
| 0.00±1.18 | | 0.00±1.18 | ||
| Line 106: | Line 106: | ||
|rowspan="2" align="center"|With flat alignment | |rowspan="2" align="center"|With flat alignment | ||
|'''X''' | |'''X''' | ||
| 0. | | 0.05±0.10 | ||
| 0.05±0.05 | | 0.05±0.05 | ||
| | | 0.56±1.67 | ||
| -1.67±1.18 | | -1.67±1.18 | ||
| Line 114: | Line 114: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''Y''' | |'''Y''' | ||
| -0.25±0. | | -0.25±0.35 | ||
| -0.29±0. | | -0.29±0.16 | ||
| 6. | | 6.39±1.67 | ||
| -1. | | -1.39±1.18 | ||
|} | |} | ||